The Microfabrication Core is open to research staff and trainees from KRCBS and iBEST. We welcome all students who want access to the facility to send us training requests. External customers please contact Dario Bogojevic.
Spin coater in the cleanroom is for photoresist only (spin coater in the Room 779 is for PDMS and other polymers)
User must clean the spin coater after each use. Do not at any time force fluids or pressuring gas in the center of the vacuum chuck. Cleaning the vacuum path in this manner can cause significant damage to the spin coater.